Investigation on the effects of halo implants for nanoscale vertical MOSFET

• Main Authors: Ismail, Razali, Saad, Ismail, Arora, Vijay
• Format: Conference or Workshop Item
• Published: 2007
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/24428/

To provide a platform for discussions of Solid State Science and Technology in all aspects of physical properties, chemistry, characterizations, preparation methods, optical properties, macro-,micro- and nano-structures. Besides that, modeling, simulation, measurement techniques as well as current d...