Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide

• Main Authors: Wahab, Yussof, Deraman, Karim, Yeong, Wai Woon
• 格式: Conference or Workshop Item
• 出版: 2007
• 主題: Q Science (General)
• 在線閱讀: http://eprints.utm.my/id/eprint/13939/

Silicon (Si) nanocrystals embedded in Si oxide matrix have been formed by rapid thermal annealing of sub-stoichiometric Si oxide films (SiOx with x < 2). The SiOx films were deposited by co-sputtering of Si oxide and Si target using magnetron RF sputtering technique. The Si-to-SiO2 ratio was cont...