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Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide

Silicon (Si) nanocrystals embedded in Si oxide matrix have been formed by rapid thermal annealing of sub-stoichiometric Si oxide films (SiOx with x < 2). The SiOx films were deposited by co-sputtering of Si oxide and Si target using magnetron RF sputtering technique. The Si-to-SiO2 ratio was cont...

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Main Authors: Wahab, Yussof, Deraman, Karim, Yeong, Wai Woon
Format: Conference or Workshop Item
Published: 2007
Subjects:
Q Science (General)
Online Access:http://eprints.utm.my/id/eprint/13939/
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spelling my.utm.139392017-09-19T08:36:48Z http://eprints.utm.my/id/eprint/13939/ Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide Wahab, Yussof Deraman, Karim Yeong, Wai Woon Q Science (General) Silicon (Si) nanocrystals embedded in Si oxide matrix have been formed by rapid thermal annealing of sub-stoichiometric Si oxide films (SiOx with x < 2). The SiOx films were deposited by co-sputtering of Si oxide and Si target using magnetron RF sputtering technique. The Si-to-SiO2 ratio was controlled by varying the number of Si chips being placed on the pure SiO2 target during sputtering. Rapid thermal anneal in nitrogen gas at 1100°C lead to the decomposition of SiOx into Si nanocrystals and SiO2. The structural (size of nanocrystals) and optical properties (absorption and luminescence) of Si nanocrystals embedded in oxide matrix, were found, strongly depend on the initial excess Si concentration in SiOx films. 2007 Conference or Workshop Item PeerReviewed Wahab, Yussof and Deraman, Karim and Yeong, Wai Woon (2007) Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide. In: Convention on Nuclear & Radioactive Material Safety, Security & Safeguards, 2007, The City Bayview Hotel, Langkawi, Kedah.
institution Universiti Teknologi Malaysia
building UTM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Malaysia
content_source UTM Institutional Repository
url_provider http://eprints.utm.my/
topic Q Science (General)
spellingShingle Q Science (General)
Wahab, Yussof
Deraman, Karim
Yeong, Wai Woon
Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide
description Silicon (Si) nanocrystals embedded in Si oxide matrix have been formed by rapid thermal annealing of sub-stoichiometric Si oxide films (SiOx with x < 2). The SiOx films were deposited by co-sputtering of Si oxide and Si target using magnetron RF sputtering technique. The Si-to-SiO2 ratio was controlled by varying the number of Si chips being placed on the pure SiO2 target during sputtering. Rapid thermal anneal in nitrogen gas at 1100°C lead to the decomposition of SiOx into Si nanocrystals and SiO2. The structural (size of nanocrystals) and optical properties (absorption and luminescence) of Si nanocrystals embedded in oxide matrix, were found, strongly depend on the initial excess Si concentration in SiOx films.
format Conference or Workshop Item
author Wahab, Yussof
Deraman, Karim
Yeong, Wai Woon
author_facet Wahab, Yussof
Deraman, Karim
Yeong, Wai Woon
author_sort Wahab, Yussof
title Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide
title_short Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide
title_full Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide
title_fullStr Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide
title_full_unstemmed Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide
title_sort effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide
publishDate 2007
url http://eprints.utm.my/id/eprint/13939/
_version_ 1643646297407750144
score 13.209306

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