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Effect of excess silicon concentration on the structural and optical characteristics of silicon nanocrystals embedded in silicon oxide

Silicon (Si) nanocrystals embedded in Si oxide matrix have been formed by rapid thermal annealing of sub-stoichiometric Si oxide films (SiOx with x < 2). The SiOx films were deposited by co-sputtering of Si oxide and Si target using magnetron RF sputtering technique. The Si-to-SiO2 ratio was cont...

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書誌詳細
主要な著者:	Wahab, Yussof, Deraman, Karim, Yeong, Wai Woon
フォーマット:	Conference or Workshop Item
出版事項:	2007
主題:	Q Science (General)
オンライン･アクセス:	http://eprints.utm.my/id/eprint/13939/
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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