Numerical analysis of vertical double gate mosfets (VDGM) with dielectric pocket (DP) effects on silicon pillar for nanoscale transistor
Numerical analysis of vertical double-gate MOSFETs (VDGM) that incorporates dielectric-pocket (DP) is addressed in this paper for the suppression of short-channel effects (SCE) and bulk punch-through. The comparison between standard and VDGM-DP revealed the advantages of DP for inhibition of SCE. Th...
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| Main Authors: | , , , , |
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| Format: | Book Section |
| Published: |
American Institute of Physics
2009
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/13017/ http://dx.doi.org/10.1063/1.3160269 |
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