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Surface acoustic wave gas sensor with nanostructured silicon sensing element

Surface acoustic wave (SAW) sensors have significant potential to monitor toxic gases, owing to their advantageous features such as fast response time, high stability, and remarkable sensitivity. Over the past few years, research has been focused on optimizing the design and fabrication of SAW senso...

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書目詳細資料
主要作者:	Ahmad Asri, Muhammad Izzudin
格式:	Thesis
語言:	English
出版:	2022
主題:	TK Electrical engineering. Electronics Nuclear engineering
在線閱讀:	http://eprints.utm.my/id/eprint/102530/1/MuhammadIzzudinAhmadMSKE2022.pdf http://eprints.utm.my/id/eprint/102530/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:151984
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