Surface acoustic wave gas sensor with nanostructured silicon sensing element

• Main Author: Ahmad Asri, Muhammad Izzudin
• Format: Thesis
• Language: English
• Published: 2022
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/102530/1/MuhammadIzzudinAhmadMSKE2022.pdf; http://eprints.utm.my/id/eprint/102530/; http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:151984

Surface acoustic wave (SAW) sensors have significant potential to monitor toxic gases, owing to their advantageous features such as fast response time, high stability, and remarkable sensitivity. Over the past few years, research has been focused on optimizing the design and fabrication of SAW senso...