Surface acoustic wave gas sensor with nanostructured silicon sensing element

• 第一著者: Ahmad Asri, Muhammad Izzudin
• フォーマット: 学位論文
• 言語: English
• 出版事項: 2022
• 主題: TK Electrical engineering. Electronics Nuclear engineering
• オンライン･アクセス: http://eprints.utm.my/id/eprint/102530/1/MuhammadIzzudinAhmadMSKE2022.pdf; http://eprints.utm.my/id/eprint/102530/; http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:151984

Surface acoustic wave (SAW) sensors have significant potential to monitor toxic gases, owing to their advantageous features such as fast response time, high stability, and remarkable sensitivity. Over the past few years, research has been focused on optimizing the design and fabrication of SAW senso...