Open-loop Characteristics of a Multilayer Electrostatic Actuator for a Fine Motion Stage

• Main Author: Md Ghazaly, Mariam
• Format: Conference or Workshop Item
• Language: English
• Published: 2010
• Subjects: TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utem.edu.my/id/eprint/8963/1/ID-ICMT50.pdf; http://eprints.utem.edu.my/id/eprint/8963/

This paper outlines the open-loop characteristics of a multilayer electrostatic actuator utilized for a fine motion stage without precise balls. The research was undertaken in order to envisage a practical and simple multilayer electrostatic actuator that produces high precision motion and sufficient force for a fine motion stage. For this purpose, a two-layer electrostatic actuator was developed and examined. Lubrication oils are used as lubricants in order to obtain low friction by maintaining the gaps between the stator and mover layers without precise balls for simplicity and easy maintenance. Each layer of the electrostatic actuator has one electrode, which consists of several beams. This paper examines the effects of the lubrication oil viscosity on the displacement and force characteristics in order to clarify the suitable lubrication oil utilized on the actuator. It was found that when using low viscosity lubrication oil, a shorter response time and greater thrust force was observed. Secondly, high dielectric fillers were added to the lubrication oil, and the displacement and force characteristics were then evaluated. The results show that addition of the fillers assisted in producing a shorter response time and a thrust force which was significantly larger. Lastly, the resultant effects of the driving signals on the motion characteristics were evaluated, which concluded with the discussion in the signal selection on demand.