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Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: Elsevier 2012
Subjects:
TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/6451/3/ICPT2012.pdf
http://eprints.utem.edu.my/id/eprint/6451/
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spelling my.utem.eprints.64512015-05-28T03:42:47Z http://eprints.utem.edu.my/id/eprint/6451/ Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid Md Ghazaly, Mariam TJ Mechanical engineering and machinery TK Electrical engineering. Electronics Nuclear engineering The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage. Elsevier 2012-11-31 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/6451/3/ICPT2012.pdf Md Ghazaly, Mariam (2012) Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid. In: 4th International Conference on Positioning Technology (ICPT2012), November 2012, Kaohsiung, Taiwan.
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Md Ghazaly, Mariam
Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
description The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
format Conference or Workshop Item
author Md Ghazaly, Mariam
author_facet Md Ghazaly, Mariam
author_sort Md Ghazaly, Mariam
title Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
title_short Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
title_full Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
title_fullStr Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
title_full_unstemmed Effect of Driving Signals on Motion Characteristics of Multilayer Electrostatic Actuator Supported by Only Lubricating Liquid
title_sort effect of driving signals on motion characteristics of multilayer electrostatic actuator supported by only lubricating liquid
publisher Elsevier
publishDate 2012
url http://eprints.utem.edu.my/id/eprint/6451/3/ICPT2012.pdf
http://eprints.utem.edu.my/id/eprint/6451/
_version_ 1665905309880680448
score 13.159267

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