Fabrication of transparent ITO/GTO bilayer diode thin films
Transparent diodes were fabricated by layering a Ga–Sn–O (GTO) film onto an In2O3:Sn (ITO) film using a facing-targeted DC sputtering method. When a GTO film containing∼25 mol% Ga was deposited on the surface of the conductive ITO film at room temperature, a diode bilayer film was obtained. The bila...
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Main Authors: | Sutan Chairul, Imran, Echimoto, Atsushi, Tazawa, Ryutaro, Murai, Kei-ichiro, Moriga, Toshihiro |
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Format: | Article |
Language: | English |
Published: |
World Scientific Publishing Co Pte Ltd
2023
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Online Access: | http://eprints.utem.edu.my/id/eprint/27208/2/0170016062023227.PDF http://eprints.utem.edu.my/id/eprint/27208/ https://worldscientific.com/doi/10.1142/S0217984923400390 |
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