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Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/10988/1/JSME_AUTUMN_MEETING.pdf
http://eprints.utem.edu.my/id/eprint/10988/
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spelling my.utem.eprints.109882015-05-28T04:14:42Z http://eprints.utem.edu.my/id/eprint/10988/ Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil Md Ghazaly, Mariam TJ Mechanical engineering and machinery TK Electrical engineering. Electronics Nuclear engineering The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage. 2011-09-20 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/10988/1/JSME_AUTUMN_MEETING.pdf Md Ghazaly, Mariam (2011) Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil. In: 2011 JSPE Autumn Meeting (2011) , September 2011, Japan.
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Md Ghazaly, Mariam
Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil
description The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
format Conference or Workshop Item
author Md Ghazaly, Mariam
author_facet Md Ghazaly, Mariam
author_sort Md Ghazaly, Mariam
title Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil
title_short Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil
title_full Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil
title_fullStr Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil
title_full_unstemmed Basic Characteristics and Positioning of Multilayer Electrostatic Actuator Supported by Only Lubrication Oil
title_sort basic characteristics and positioning of multilayer electrostatic actuator supported by only lubrication oil
publishDate 2011
url http://eprints.utem.edu.my/id/eprint/10988/1/JSME_AUTUMN_MEETING.pdf
http://eprints.utem.edu.my/id/eprint/10988/
_version_ 1665905444728602624
score 13.160551

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