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Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids

The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.

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Bibliographic Details
Main Author: Md Ghazaly, Mariam
Format: Conference or Workshop Item
Language:English
Published: 2012
Subjects:
TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utem.edu.my/id/eprint/10984/1/JSME_AUTUMN_MEETING2012.pdf
http://eprints.utem.edu.my/id/eprint/10984/
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id my.utem.eprints.10984
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spelling my.utem.eprints.109842015-05-28T04:14:40Z http://eprints.utem.edu.my/id/eprint/10984/ Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids Md Ghazaly, Mariam TJ Mechanical engineering and machinery TK Electrical engineering. Electronics Nuclear engineering The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage. 2012-09-14 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/10984/1/JSME_AUTUMN_MEETING2012.pdf Md Ghazaly, Mariam (2012) Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids. In: 2012 JSPE Autumn Meeting (2012), September 2012, Japan.
institution Universiti Teknikal Malaysia Melaka
building UTEM Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknikal Malaysia Melaka
content_source UTEM Institutional Repository
url_provider http://eprints.utem.edu.my/
language English
topic TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
spellingShingle TJ Mechanical engineering and machinery
TK Electrical engineering. Electronics Nuclear engineering
Md Ghazaly, Mariam
Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
description The present paper describes the characteristic switching of a multilayer thin electrostatic actuator supported by only lubricating oil and its application in the control of an ultra-precision fine stage.
format Conference or Workshop Item
author Md Ghazaly, Mariam
author_facet Md Ghazaly, Mariam
author_sort Md Ghazaly, Mariam
title Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
title_short Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
title_full Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
title_fullStr Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
title_full_unstemmed Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids
title_sort precision vertical fine stage using multilayer electrostatic actuator supported by lubricating liquids
publishDate 2012
url http://eprints.utem.edu.my/id/eprint/10984/1/JSME_AUTUMN_MEETING2012.pdf
http://eprints.utem.edu.my/id/eprint/10984/
_version_ 1665905444450729984
score 13.160551

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