Design And Simulation Of High Q Inductors On Au-Compensated High Resistivity Silicon

• Main Author: Yap, Chee Seong
• Format: Monograph
• Language: English
• Published: Universiti Sains Malaysia 2017
• Subjects: T Technology; TK Electrical Engineering. Electronics. Nuclear Engineering
• Online Access: http://eprints.usm.my/52937/1/Design%20And%20Simulation%20Of%20High%20Q%20Inductors%20On%20Au-Compensated%20High%20Resistivity%20Silicon_Yap%20Chee%20Seong_E3_2017.pdf; http://eprints.usm.my/52937/

The potential of the Au-compensated high resistivity silicon as a microwave substrate was investigated as the high resistivity semiconductor substrates play a crucial role in low loss and high performance MMIC devices. High resistivity substrates are essential to keep the signal-to-noise ratio at ac...