Design, simulation and modeling of high Q RF MEMS inductor

• Main Authors: Rahimi, Maryam, Jamuar, Sudhanshu Shekhar, Hamidon, Mohd Nizar, Ahmad, Mohd Rais, Mousavi, Sayed Alireza, Bayat, Mehdi
• Format: Article
• Language: English
• Published: Praise Worthy Prize 2008
• Online Access: http://psasir.upm.edu.my/id/eprint/13919/1/Design.pdf; http://psasir.upm.edu.my/id/eprint/13919/

Silicon integrated circuit spiral inductors and transformers are finding wide ranging applications in RF circuits. This paper presents implementation and characterization of spiral inductor using MEMS technology on silicon substrate for use in design of voltage controlled oscillator (VCO). MEMS indu...