Aluminum Nitride Thin Films Grown Sol-gel Spin Coating Technique

In this study, aluminum nitride (AIN) thin films were grown on p-type silicon (1 00) substrate by sol-gel spin coating method. Two types of ethanol-based precursors were prepared , namely, precursors with and without the aid of diethanolamine (DEA). The objective of this work is to investigate the e...

Full description

Saved in:
Bibliographic Details
Main Authors: Isa, Nurul Atikah Mohd, Ng, Sha Shiong, Hassan, Zainuriah
Format: Conference or Workshop Item
Language:English
Published: 2017
Subjects:
Online Access:http://eprints.usm.my/48804/1/NG17_OP07.pdf%20done.pdf
http://eprints.usm.my/48804/
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items