Effect of Nitrogen Gas on the Growth of Magnesium Doped Indium Nitride Thin Films via Sol-gel Spin Coating Method
The growth of magnesium doped indium nitride (InN:Mg) thin films via sol-gel spin coating method followed by nitridation process was reported in this paper. In this work, the nitridation processes were carried under ammonia with and without nitrogen ambiences. X-ray diffraction patterns reveal that...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48997/1/NG03_OP.pdf%20cut.pdf http://eprints.usm.my/48997/ |
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