Aluminum Nitride Thin Films Grown Sol-gel Spin Coating Technique
In this study, aluminum nitride (AIN) thin films were grown on p-type silicon (1 00) substrate by sol-gel spin coating method. Two types of ethanol-based precursors were prepared , namely, precursors with and without the aid of diethanolamine (DEA). The objective of this work is to investigate the e...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
|
| Subjects: | |
| Online Access: | http://eprints.usm.my/48804/1/NG17_OP07.pdf%20done.pdf http://eprints.usm.my/48804/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|