Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods
FinFET; Leakage currents; Polycrystalline materials; Polysilicon; Semiconductor doping; Taguchi methods; Threshold voltage; Comparative analysis; Design and optimization; Electrical characterization; International Technology Roadmap for Semiconductors; Optimization approach; Process parameter variat...
Saved in:
| Main Authors: | , , , , , , , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Conference Paper |
| Published: |
Institute of Physics Publishing
2023
|
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| id |
my.uniten.dspace-23529 |
|---|---|
| record_format |
dspace |
| spelling |
my.uniten.dspace-235292023-05-29T14:50:06Z Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods Roslan A.F. Salehuddin F. M Zain A.S. Mansor N. Kaharudin K.E. Ahmad I. Hazura H. Hanim A.R. Idris S.K. Zaiton A.M. Zarina B.Z. Mohamad N.R. A Hamid A.M. 57203514087 36239165300 57204976577 57511094100 56472706900 12792216600 35108985200 57193616206 57202632295 36069361000 57204975604 55383652800 57204976414 FinFET; Leakage currents; Polycrystalline materials; Polysilicon; Semiconductor doping; Taguchi methods; Threshold voltage; Comparative analysis; Design and optimization; Electrical characterization; International Technology Roadmap for Semiconductors; Optimization approach; Process parameter variations; Subthreshold voltages; Threshold voltages (Vth); Statistical methods This paper investigates on the design and optimization of the input process parameter variations in Double Gate FinFET (DG-FinFET) device through comparisons between two different statistical methods through Taguchi and 2-k factorial design. This research focuses on the effects on threshold voltage (V TH ), leakage current (I OFF ), drive current (I ON ), and the subthreshold voltage (SS) towards various parameter variations. The fabrication of the device as well as its electrical characterization are both performed using TCAD simulator, specifically ATHENA and ATLAS modules. Optimization of the process parameters is implemented and merged with the aforementioned modules. The comparisons are also conducted for the Taguchi and 2-k factorial design, statistical methods after implementation is done for both. The optimum condition for the process parameters are obtained with Polysilicon Doping Dose at Level 3 (3.7E14 atom/cm 3 ), Polysilicon Doping Tilt at Level 3 (-17�), Source/Drain Doping Tilt at Level 1 (73�) and Threshold Voltage Doping dose at Level 2 (1.95E13 atom/cm 3 ). The S/N ratio of Threshold Voltage, Leakage Current, Drive Current and Subthreshold Voltage values are in the predicted range of the International Technology Roadmap for Semiconductors (ITRS) 2015 prediction. Based on comparisons made, optimization approach works best and most suitable with the Taguchi method due to the consideration of noise factor used in the orthogonal array, despite the fact that both Taguchi and 2-k factorial design process is able to produce optimum solutions that are within the desired values. � Published under licence by IOP Publishing Ltd. Final 2023-05-29T06:50:06Z 2023-05-29T06:50:06Z 2018 Conference Paper 10.1088/1742-6596/1123/1/012048 2-s2.0-85058240175 https://www.scopus.com/inward/record.uri?eid=2-s2.0-85058240175&doi=10.1088%2f1742-6596%2f1123%2f1%2f012048&partnerID=40&md5=1e90e2f0bfc5f4ab2a07692541ab9278 https://irepository.uniten.edu.my/handle/123456789/23529 1123 1 12048 All Open Access, Bronze Institute of Physics Publishing Scopus |
| institution |
Universiti Tenaga Nasional |
| building |
UNITEN Library |
| collection |
Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
Universiti Tenaga Nasional |
| content_source |
UNITEN Institutional Repository |
| url_provider |
http://dspace.uniten.edu.my/ |
| description |
FinFET; Leakage currents; Polycrystalline materials; Polysilicon; Semiconductor doping; Taguchi methods; Threshold voltage; Comparative analysis; Design and optimization; Electrical characterization; International Technology Roadmap for Semiconductors; Optimization approach; Process parameter variations; Subthreshold voltages; Threshold voltages (Vth); Statistical methods |
| author2 |
57203514087 |
| author_facet |
57203514087 Roslan A.F. Salehuddin F. M Zain A.S. Mansor N. Kaharudin K.E. Ahmad I. Hazura H. Hanim A.R. Idris S.K. Zaiton A.M. Zarina B.Z. Mohamad N.R. A Hamid A.M. |
| format |
Conference Paper |
| author |
Roslan A.F. Salehuddin F. M Zain A.S. Mansor N. Kaharudin K.E. Ahmad I. Hazura H. Hanim A.R. Idris S.K. Zaiton A.M. Zarina B.Z. Mohamad N.R. A Hamid A.M. |
| spellingShingle |
Roslan A.F. Salehuddin F. M Zain A.S. Mansor N. Kaharudin K.E. Ahmad I. Hazura H. Hanim A.R. Idris S.K. Zaiton A.M. Zarina B.Z. Mohamad N.R. A Hamid A.M. Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods |
| author_sort |
Roslan A.F. |
| title |
Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods |
| title_short |
Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods |
| title_full |
Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods |
| title_fullStr |
Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods |
| title_full_unstemmed |
Comparative Analysis of Process Parameter Variations in DGFinFET Device Using Statistical Methods |
| title_sort |
comparative analysis of process parameter variations in dgfinfet device using statistical methods |
| publisher |
Institute of Physics Publishing |
| publishDate |
2023 |
| _version_ |
1806426499134259200 |
| score |
13.214268 |