MOS Transistor Mask Design Using SEM Based E-Beam Lithography

• 主要な著者: Uda, Hashim, Prof. Dr., Nur Hamidah, Abdul Halim, Mohammad Nuzaihan, Md Nor, Zul Azhar, Zahid Jamal, Prof. Dr.
• その他の著者: [e-mail]
• フォーマット: Image
• 言語: English
• 出版事項: Malaysian Invention & Design Society (MINDS) 2010
• 主題: E-Beam Lithography (EBL); MOS Transistor Mask Design; KUKUM > Research; International Invention, Innovation & Technology Exhibition; ITEX 2006
• オンライン･アクセス: http://dspace.unimap.edu.my/xmlui/handle/123456789/8345

Prof. Dr. Uda Hashim and his team won silver for MOS Transistor Mask Design Using SEM Based E-Beam Lithography at ITEX 2006, 19th - 21st May 2006 at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur.