Normah, A. (2009). Characterization of robust alignment mark to improve alignment performance. Institute of Electrical and Electronics Engineering (IEEE).
Chicago Style CitationNormah, Ahmad. Characterization of Robust Alignment Mark to Improve Alignment Performance. Institute of Electrical and Electronics Engineering (IEEE), 2009.
MLA CitationNormah, Ahmad. Characterization of Robust Alignment Mark to Improve Alignment Performance. Institute of Electrical and Electronics Engineering (IEEE), 2009.
Warning: These citations may not always be 100% accurate.