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Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET

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书目详细资料
Main Authors:	Babu, S. K. Suresh, Youvanidha, A., Jackuline Moni, D., Divya, S.
其他作者:	moni@karunya.edu
格式:	Article
语言:	English
出版:	Universiti Malaysia Perlis (UniMAP) 2019
主题:	Yttrium oxide Pulsed laser deposition Crystalline structure Field effect transistor High-K gate dielectric
在线阅读:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/61119
标签:	添加标签没有标签, 成为第一个标记此记录!

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