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Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET

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Main Authors: Babu, S. K. Suresh, Youvanidha, A., Jackuline Moni, D., Divya, S.
Other Authors: moni@karunya.edu
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2019
Subjects:
Yttrium oxide
Pulsed laser deposition
Crystalline structure
Field effect transistor
High-K gate dielectric
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/61119
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spelling my.unimap-611192019-08-01T08:40:04Z Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET Babu, S. K. Suresh Youvanidha, A. Jackuline Moni, D. Divya, S. moni@karunya.edu Yttrium oxide Pulsed laser deposition Crystalline structure Field effect transistor High-K gate dielectric Link to publisher's homepage at http://ijneam.unimap.edu.my The paper focuses on the effect of the crystalline structure and surface morphology on the electrical properties of Yttrium oxide (Y2O3) thin films. The impact on the change in substrate temperature from ambient to 650°C in low oxygen pressure (0.0034mbar) was realized by change in crystallinity and morphology. The XRD result shows the preferred orientation along the (400) plane. The effect of substrate temperature on the crystal structure has been studied and the same impact has been observed in film morphology using scanning electron microscopy. The higher dielectric constant of 21 was observed at room temperature deposition. The transfer characteristic of Y2O3 gate dielectric based Si-MOSFET gives current ratio ION/IOFF of 107 and threshold voltage of -2.8V. Furthermore, from output characteristics, the obtained Idss is 0.415 mA. The high ION/IOFF, makes it suitable for digital gates, optical electronics, SMPS and portable electronic applications. 2019-08-01T08:40:04Z 2019-08-01T08:40:04Z 2019-07 Article International Journal of Nanoelectronics and Materials, vol.12(3), 2019, pages 339-348 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/61119 en Universiti Malaysia Perlis (UniMAP)
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Yttrium oxide
Pulsed laser deposition
Crystalline structure
Field effect transistor
High-K gate dielectric
spellingShingle Yttrium oxide
Pulsed laser deposition
Crystalline structure
Field effect transistor
High-K gate dielectric
Babu, S. K. Suresh
Youvanidha, A.
Jackuline Moni, D.
Divya, S.
Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET
description Link to publisher's homepage at http://ijneam.unimap.edu.my
author2 moni@karunya.edu
author_facet moni@karunya.edu
Babu, S. K. Suresh
Youvanidha, A.
Jackuline Moni, D.
Divya, S.
format Article
author Babu, S. K. Suresh
Youvanidha, A.
Jackuline Moni, D.
Divya, S.
author_sort Babu, S. K. Suresh
title Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET
title_short Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET
title_full Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET
title_fullStr Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET
title_full_unstemmed Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET
title_sort effect of crystallinity and morphology on the electrical properties of y2o3 thin films prepared by pulsed laser deposition for mosfet
publisher Universiti Malaysia Perlis (UniMAP)
publishDate 2019
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/61119
_version_ 1643806583629545472
score 13.214268

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