Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET

• Main Authors: Babu, S. K. Suresh, Youvanidha, A., Jackuline Moni, D., Divya, S.
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Universiti Malaysia Perlis (UniMAP) 2019
• Subjects: Yttrium oxide; Pulsed laser deposition; Crystalline structure; Field effect transistor; High-K gate dielectric
• Online Access: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/61119

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