Holdings: Effect of crystallinity and morphology on the electrical properties of Y2O3 thin films prepared by pulsed laser deposition for MOSFET

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Bibliographic Details
Main Authors:	Babu, S. K. Suresh, Youvanidha, A., Jackuline Moni, D., Divya, S.
Other Authors:	moni@karunya.edu
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis (UniMAP) 2019
Subjects:	Yttrium oxide Pulsed laser deposition Crystalline structure Field effect transistor High-K gate dielectric
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/61119
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