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Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach

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Bibliographic Details
Main Authors: G. M., Sundaram, Angira, Mahesh, Gupta, Navneet, Rangra, Kamaljit
Format: Article
Language:English
Published: Universiti Malaysia Perlis 2017
Subjects:
Material Selection
CMOS
MEMS
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/49198
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