Description: Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach

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Bibliographic Details
Main Authors:	G. M., Sundaram, Angira, Mahesh, Gupta, Navneet, Rangra, Kamaljit
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis 2017
Subjects:	Material Selection CMOS MEMS
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/49198
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Summary:	Link to publisher's homepage at http://ijneam.unimap.edu.my/