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Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach

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Main Authors: G. M., Sundaram, Angira, Mahesh, Gupta, Navneet, Rangra, Kamaljit
Format: Article
Language:English
Published: Universiti Malaysia Perlis 2017
Subjects:
Material Selection
CMOS
MEMS
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/49198
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spelling my.unimap-491982017-11-21T01:48:15Z Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach G. M., Sundaram Angira, Mahesh Gupta, Navneet Rangra, Kamaljit Material Selection CMOS MEMS Link to publisher's homepage at http://ijneam.unimap.edu.my/ In this paper, the most appropriate material for MEMS Disk resonator compatible with CMOS technology is selected using the Ashby approach. Materials indices are formulated based on three primary performance parameters, namely high Q, high resonant frequency, and low process temperature. The selection chart shows that for high Q and high frequency, polySi0.35Ge0.65 is the best possible material for MEMS resonator. The close match between theoretical and experimental findings validates our proposed study. 2017-07-26T07:11:31Z 2017-07-26T07:11:31Z 2016 Article International Journal of Nanoelectronics and Materials, vol.9 (2), 2016, pages 157-164 1985-5761 (Printed) 1997-4434 (Online) http://dspace.unimap.edu.my:80/xmlui/handle/123456789/49198 en Universiti Malaysia Perlis
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Material Selection
CMOS
MEMS
spellingShingle Material Selection
CMOS
MEMS
G. M., Sundaram
Angira, Mahesh
Gupta, Navneet
Rangra, Kamaljit
Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
description Link to publisher's homepage at http://ijneam.unimap.edu.my/
format Article
author G. M., Sundaram
Angira, Mahesh
Gupta, Navneet
Rangra, Kamaljit
author_facet G. M., Sundaram
Angira, Mahesh
Gupta, Navneet
Rangra, Kamaljit
author_sort G. M., Sundaram
title Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
title_short Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
title_full Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
title_fullStr Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
title_full_unstemmed Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
title_sort material selection for cmos compatible high q and high frequency mems disk resonator using ashby approach
publisher Universiti Malaysia Perlis
publishDate 2017
url http://dspace.unimap.edu.my:80/xmlui/handle/123456789/49198
_version_ 1643802821182619648
score 13.214268

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