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Surface roughness analysis on reactive ion etched aluminium deposited wafer

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Main Authors:	Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Aaron, Koay Terr Yeow
其他作者:	zaliman@unimap.edu.my
格式:	Article
语言:	English
出版:	Trans Tech Publications 2014
主题:	Aluminum DOE Reactive Ion Etching (RIE) Surface roughness
在线阅读:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33658
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