Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications

• Main Authors: Nashrul Fazli, Mohd Nasir, Charan, M. Shah, Leech, Patrick William, Reeves, Geoffrey K., Pirogova, Elena, Istivan, Taghrid S, Tanner, Philip G., Holland, Anthony Stephen
• Other Authors: [e-mail]
• Format: Working Paper
• Language: English
• Published: Institute of Electrical and Electronics Engineers (IEEE) 2012
• Subjects: Silicon Carbide; Microfabrication; Micromachining; Membrane; Wet etching; Reactive ion etching; X-Ray Photoelectron Spectroscopy (XPS); Biomedical microdevices
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/21405

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