Description: Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications

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Bibliographic Details
Main Authors:	Nashrul Fazli, Mohd Nasir, Charan, M. Shah, Leech, Patrick William, Reeves, Geoffrey K., Pirogova, Elena, Istivan, Taghrid S, Tanner, Philip G., Holland, Anthony Stephen
Other Authors:	nashrul@unimap.edu.my
Format:	Working Paper
Language:	English
Published:	Institute of Electrical and Electronics Engineers (IEEE) 2012
Subjects:	Silicon Carbide Microfabrication Micromachining Membrane Wet etching Reactive ion etching X-Ray Photoelectron Spectroscopy (XPS) Biomedical microdevices
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/21405
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