Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Working Paper |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2012
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| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/21393 |
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