Comparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensor

• Main Authors: Zaiazmin, Y. N., Ishak, Abdul Azid
• Format: Article
• Language: English
• Published: Institute of Electrical and Electronics Engineering (IEEE) 2009
• Subjects: Digital simulation; Micromechanical devices; Pressure sensors; Computerised instrumentation; CATIA (Computer file); Computer-aided engineering; ANSYS (Computer system); Sensor
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/6917

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