Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm
Link to publisher's homepage at http://ieeexplore.ieee.org/
Saved in:
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Working Paper |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2012
|
| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/21393 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| id |
my.unimap-21393 |
|---|---|
| record_format |
dspace |
| spelling |
my.unimap-213932012-10-18T07:41:53Z Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm M., Shahiri-Tabarestani B. A., Ganji R., Sabbaghi-Nadooshan cmos_1945@yahoo.com baganji@nit.ac.ir MEMS Capacitive pressure sensor Sensitivity Slotted diaphragm Link to publisher's homepage at http://ieeexplore.ieee.org/ This paper presents a high sensitive MEMS capacitive pressure sensor for biomedical applications. Two sensor designs incorporating clamped and slotted diaphragm are implemented and compared to realize the pressure-sensitive components. The pressure sensor has been designed to measure pressures in the range of 0 to 60 mmhg that is in the range of intraocular pressure sensors. Intraocular pressure sensors are important in detection and treatment of an incurable disease called glaucoma. The capacitive pressure sensor is formed using p++ silicon diaphragm as a biocompatible material. The novelty of this method relies on p++si diaphragm includes some slots to reduce the effect of residual stress and stiffness of diaphragm. The slotted diaphragm makes capacitive pressure sensor more sensitive. That is more suitable for measuring intraocular pressure sensor. The results yield a sensitivity of 1.811×10-5 1/Pa for the clamped and 5.96×10-5 1/Pa for the slotted pressure sensor with a 0.55 × 0.55 mm2 diaphragm. Furthermore, the pull-in voltage for the clamped pressure sensor is 51v, while the pull-in voltage of the slotted one is 38v. 2012-10-18T07:41:53Z 2012-10-18T07:41:53Z 2012-02-27 Working Paper p. 484-489 978-145771989-9 http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6179064 http://hdl.handle.net/123456789/21393 en Proceedings of the International Conference on Biomedical Engineering (ICoBE 2012) Institute of Electrical and Electronics Engineers (IEEE) |
| institution |
Universiti Malaysia Perlis |
| building |
UniMAP Library |
| collection |
Institutional Repository |
| continent |
Asia |
| country |
Malaysia |
| content_provider |
Universiti Malaysia Perlis |
| content_source |
UniMAP Library Digital Repository |
| url_provider |
http://dspace.unimap.edu.my/ |
| language |
English |
| topic |
MEMS Capacitive pressure sensor Sensitivity Slotted diaphragm |
| spellingShingle |
MEMS Capacitive pressure sensor Sensitivity Slotted diaphragm M., Shahiri-Tabarestani B. A., Ganji R., Sabbaghi-Nadooshan Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm |
| description |
Link to publisher's homepage at http://ieeexplore.ieee.org/ |
| author2 |
cmos_1945@yahoo.com |
| author_facet |
cmos_1945@yahoo.com M., Shahiri-Tabarestani B. A., Ganji R., Sabbaghi-Nadooshan |
| format |
Working Paper |
| author |
M., Shahiri-Tabarestani B. A., Ganji R., Sabbaghi-Nadooshan |
| author_sort |
M., Shahiri-Tabarestani |
| title |
Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm |
| title_short |
Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm |
| title_full |
Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm |
| title_fullStr |
Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm |
| title_full_unstemmed |
Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm |
| title_sort |
design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm |
| publisher |
Institute of Electrical and Electronics Engineers (IEEE) |
| publishDate |
2012 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/21393 |
| _version_ |
1643793391228551168 |
| score |
13.222552 |