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Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)

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Bibliographic Details
Main Author: Muhammad Afif Abdul Rahman
Other Authors: Shaiful Nizam Mohyar (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Electron beams
Scanning electron microscopes
Silicon
Microelectronics
Microelectronic fabrication
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1984
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spelling my.unimap-19842008-09-09T04:12:23Z Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID) Muhammad Afif Abdul Rahman Shaiful Nizam Mohyar (Advisor) Electron beams Scanning electron microscopes Silicon Microelectronics Microelectronic fabrication Access is limited to UniMAP community. Electron beam induced deposition (EBID) is a well established technique for highresolution direct material deposition from the gas phase onto a substrate. A finely focused electron beam of a scanning electron microscope or an electron beam writing system locally decomposes gas molecules which are adsorbed on the sample surface. The resulting volatile components are evacuated by the pumping system, while nonvolatile material is cross-linked in a kind of polymerization process, building up the deposit. In this project, the influence of acceleration voltage will be studied as a parameter. The influences of the length, diameter and shape of the deposited structures are also analyzed in this project. 2008-09-08T08:13:45Z 2008-09-08T08:13:45Z 2008-03 Learning Object http://hdl.handle.net/123456789/1984 en Universiti Malaysia Perlis School of Microelectronic Engineering
institution Universiti Malaysia Perlis
building UniMAP Library
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Malaysia Perlis
content_source UniMAP Library Digital Repository
url_provider http://dspace.unimap.edu.my/
language English
topic Electron beams
Scanning electron microscopes
Silicon
Microelectronics
Microelectronic fabrication
spellingShingle Electron beams
Scanning electron microscopes
Silicon
Microelectronics
Microelectronic fabrication
Muhammad Afif Abdul Rahman
Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
description Access is limited to UniMAP community.
author2 Shaiful Nizam Mohyar (Advisor)
author_facet Shaiful Nizam Mohyar (Advisor)
Muhammad Afif Abdul Rahman
format Learning Object
author Muhammad Afif Abdul Rahman
author_sort Muhammad Afif Abdul Rahman
title Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_short Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_full Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_fullStr Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_full_unstemmed Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
title_sort study of acceleratin voltage influence the conical structure during electron beam induced deposition (ebid)
publisher Universiti Malaysia Perlis
publishDate 2008
url http://dspace.unimap.edu.my/xmlui/handle/123456789/1984
_version_ 1643787513984188416
score 13.222552

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