Simulation, fabrication and electrical characterization of p-Si capacitor design structure

• Main Author: Cheryl She Siew Yuet
• Other Authors: Noraini Othman (Advisor)
• Format: Learning Object
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Semiconductor > Design and construction; Computer-aided design; Computer simulation; Silicon; p-Si capacitors; Capacitors
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1954

Technology CAD (TCAD) refers to the use of computer simulation to model semiconductor processing and device operation. TCAD has two major functions which are process simulation and device simulation. It performs the semiconductor process simulation function and the device simulation function by taki...