Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method

Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and biomedical engineering. Fabrication of Nanowires is one of the great challenges t...

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Bibliographic Details
Main Author: Mohammad Nuzaihan Md Nor
Format: Thesis
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1494
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