Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method

• Main Author: Mohammad Nuzaihan Md Nor
• Format: Thesis
• Language: English
• Published: Universiti Malaysia Perlis 2008
• Subjects: Silicon; Nanowires; Nanotechnology; Nanowires > Design and construction; Nanostructured materials
• Online Access: http://dspace.unimap.edu.my/xmlui/handle/123456789/1494

Nanowires is a new class of materials that have attracted attention and great research interest in the last few years because of their potential applications in nanotechnology such as nanoelectronic, nanomechanical and biomedical engineering. Fabrication of Nanowires is one of the great challenges t...