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Influence of argon/nitrogen sputtering gas and molybdenum/titanium seed layer on aluminium nitride ⟨100⟩ thin film growth using ceramic target

Aluminium nitride (AlN) can be sputter-deposited onto a substrate to form polycrystalline or single crystal AlN thin film layer. Highly crystalline AlN in ⟨100⟩ orientation has found its application in high-frequency acoustic wave resonators. The research work to investigate AlN ⟨100⟩ crystal growth...

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Main Authors:	Samad, Muhammad Izzuddin Abd, Badrudin, Syazwani Izrah, Ponnuthurai, Darven Raj, Mansor, Marwan, Nayan, Nafarizal, Abu Bakar, Ahmad Shuhaimi, Latif, Rhonira
格式:	Article
出版:	Elsevier 2024
主题:	QC Physics
在线阅读:	http://eprints.um.edu.my/44756/ https://doi.org/10.1016/j.jmrt.2024.01.286
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