Aluminium thin film surface modification via low-pressure and atmospheric-pressure argon plasma exposure
Abstract: Hydrophilicity of the aluminium thin film’s surface is one of the imperative surface characteristics needed for metal pad bonding process in microelectronic circuitries. In this paper, we present a study on the influence of argon plasma exposure on the surface properties of sputter-deposit...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
Pleiades journals
2022
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/43607/ |
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