The effect of carbon contamination and argon ion sputtering on the work function of chlorinated indium tin oxide

• Main Authors: Whitcher, T.J., Yeoh, K.H., Chua, C.L., Woon, Kai Lin, Chanlek, N., Nakajima, H., Saisopa, T., Songsiriritthigul, P.
• Format: Article
• Published: Elsevier 2014
• Subjects: Q Science (General); QC Physics
• Online Access: http://eprints.um.edu.my/12982/; http://www.sciencedirect.com/science/article/pii/S1567173914000066; http://dx.doi.org/10.1016/j.cap.2014.01.003

The work function of indium tin oxide (ITO) was increased by treating ITO with dichlorobenzene with UV light. Carbon contamination of the Cl-ITO was measured using X-ray Photoelectron Spectroscopy (XPS) and argon ion sputtering was used to remove the carbon from the surface. It was found that the ca...