表紙画像

Structural characteristics of samarium oxynitride on silicon substrate

Thermal oxynitridation of 20 nm sputtered pure samarium metal film on silicon substrates were carried out in nitrous oxide gas ambient at various temperatures (600–900 °C) for 15 min. Influences of the oxynitridation temperature on the structural and chemical properties of the SmxOyNz films had been...

保存先:

書誌詳細
主要な著者:	Goh, K.H., Haseeb, A.S. Md. Abdul, Wong, Y.H.
フォーマット:	論文
出版事項:	Elsevier 2017
主題:	TJ Mechanical engineering and machinery
オンライン･アクセス:	http://eprints.um.edu.my/17554/ https://doi.org/10.1016/j.jallcom.2017.06.179
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

類似資料

Samarium oxide and samarium oxynitride thin film gate oxides on silicon substrate / Goh Kian Heng
著者:: Goh, Kian Heng
出版事項: (2017)

Formation of Zr- oxynitride thin films on 4H-SiC substrate
著者:: Wong, Y.H., 等
出版事項: (2012)

Effect of Oxidation Temperature on Physical and Electrical Properties of Sm2O3 Thin-Film Gate Oxide on Si Substrate
著者:: Goh, K.H., 等
出版事項: (2016)

Physical and electrical properties of thermal oxidized Sm2O3 gate oxide thin film on Si substrate: Influence of oxidation durations
著者:: Goh, K.H., 等
出版事項: (2016)

Trap-assisted tunneling mechanism of Zirconium Oxynitride (ZrON) thin film on Silicon Carbide / Nicklaane Krishnamoorthy
著者:: Nicklaane, Krishnamoorthy
出版事項: (2020)

Lanthanide rare earth oxide thin film as an alternative gate oxide
著者:: Goh, K.H., 等
出版事項: (2017)

Metal-Oxide-Semiconductor Characteristics of Zr-Oxynitride Thin Film on 4H-SiC Substrate
著者:: Wong, Yew Hoong, 等
出版事項: (2012)

Nanoindentation Of Copper Thin Film On Silicon Substrates
著者:: Zalkapli, Muhammad Amir
出版事項: (2022)

ZrO2 thin films on Si substrate
著者:: Wong, Y.H., 等
出版事項: (2010)

Neodymium oxide thin film gate oxide on silicon substrate / Hetherin Karuppiah
著者:: Hetherin , Karuppiah
出版事項: (2018)

Properties of thermally oxidized and nitrided Zr-oxynitride thin film on 4H–SiC in diluted N2O ambient
著者:: Wong, Y.H., 等
出版事項: (2012)

Formation of germanium oxynitride as buffer layer on germanium substrate / Soh Wee Chen
著者:: Soh, Wee Chen
出版事項: (2018)

Thermal characteristic of sintered Ag-Cu nanopaste for high-temperature die-attach application
著者:: Tan, K.S., 等
出版事項: (2015)

Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
著者:: Saaran, Idris
出版事項: (2010)

Synthesis and analysis of silicon nanowires grown on Si (111) substrate at different silane gas flow rate
著者:: Wahab, Yussof, 等
出版事項: (2012)

Electroless nickel underlayer deposited between copper filler and silicon substrate: effect of bath pH
著者:: Anuar, M. A. N., 等
出版事項: (2021)

Feasible laser parameters in fabrication of MEMS structures on silicon
著者:: Yong, Chee Ping
出版事項: (2010)

Nanoscale microstructural characterization of aluminum and copper bilayer thin films deposited on silicon substrate using magnetron sputtering technique
著者:: Abdul Halim, Zulhelmi Alif
出版事項: (2014)

Synthesis and characterization of γ-Fe2O3 NPs on silicon substrate for power device application
著者:: Abu Hussein, Nurul Athirah, 等
出版事項: (2018)

Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
著者:: Awang Sh'ri, Dayangku Noorfazidah
出版事項: (2009)

Development of holmium oxide thin film as high-K gate dielectric based on silicon carbide substrate / Odesanya Kazeem Olabisi
著者:: Odesanya Kazeem , Olabisi
出版事項: (2022)

Self-assembly of synthesized 4-pentynoic acid functionalized magnetite-maghemite nanoparticles on silicon dioxide/n-type silicon substrate / Aainaa Aqilah Baharuddin
著者:: Aainaa Aqilah, Baharuddin
出版事項: (2017)

Self-assembly and electrical characteristics of 4-pentynoic acid functionalized Fe3O4-γ-Fe2O3 nanoparticles on SiO2/n-Si
著者:: Baharuddin, A.A., 等
出版事項: (2017)

Condition monitoring on vibration characteristics of composite structures
著者:: Wong, Ging Huo
出版事項: (1999)

The Study on Thermal Environment and Airflow Pattern in an UFAD System Under a Cooling Mode
著者:: Yau, Y.H., 等
出版事項: (2020)

Effects of chemical mechanical polishing (CMP) parameters on NIP/AL substrate surface characteristics
著者:: Rosli, Mohd. Aidil
出版事項: (2014)

XRD studies on residual stress of the diamond films grown using hot filament chemical vapour deposition technique on silicon nitride and tungsten carbide substrates
著者:: Hamzah, Esah, 等
出版事項: (2013)

Comparative assessment of performance, emissions and combustion characteristics of gasoline/diesel and gasoline/biodiesel in a dual-fuel engine
著者:: Teoh, Y.H., 等
出版事項: (2015)

Soldering Characteristics and Mechanical Properties of Sn-1.0Ag-0.5Cu Solder with Minor Aluminum Addition
著者:: Leong, Y.M., 等
出版事項: (2016)

Energy analysis of green office buildings in the tropics—Photovoltaic system
著者:: Yau, Y.H., 等
出版事項: (2016)

Friction-Stir Processing of a Cold Sprayed AA7075 Coating Layer on the AZ31B Substrate: Structural Homogeneity, Microstructures and Hardness
著者:: Khodabakhshi, F., 等
出版事項: (2017)

Nano-structured diamond & silica coatings on CO-CR-MO substrate for biomedical application
著者:: Kumaran, Kadirgama, 等

Effect of Oxidation temperature on the thin film samarium (III) oxide growth on germanium subtrate / Gary Tan
著者:: Gary, Tan
出版事項: (2018)

Characterisation of electroless deposition parameter of copper on silicon wafer for through silicon via application
著者:: Mior Shahidin, Shazatul Akmaliah
出版事項: (2019)

VHF-PECVD grown silicon nanoneedles: role of substrate temperature
著者:: Mohammed, Y.H., 等
出版事項: (2016)

Studies on electrodeposition behavior of Sn–Bi alloys in plating baths modified by hydroquinone and gelatin
著者:: Goh, Y., 等
出版事項: (2016)

A comprehensive case study of climate change impacts on the cooling load in an air-conditioned office building in Malaysia
著者:: Yau, Y.H., 等
出版事項: (2017)

Feasibility study of an ice slurry-cooling coil for HVAC and R systems in a tropical building
著者:: Yau, Y.H., 等
出版事項: (2010)

Extraction of a single Stokes line from a Brillouin fibre laser using a silicon oxynitride microring filter
著者:: Zulkifli, M.Z., 等
出版事項: (2013)

A study of the stabilities, microstructures and fuel characteristics of tri-fuel (diesel-biodiesel-ethanol) using various fuel preparation methods
著者:: Lee, K.H., 等
出版事項: (2017)