Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber
Over the last few decades, there was a substantial appeal on the growth of gallium-nitride (Ga-N) based alloy for high performance optoelectronic devices such as blue/violet laser diode, blue/white light emitting diode etc. In the recent years, there have been revolutionary changes in semiconductor...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Springer Verlag (Germany)
2015
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/14048/1/Modeling_and_simulation_of_metal_organic_halide_vapor.pdf http://eprints.um.edu.my/14048/ https://doi.org/10.1007/s00542-013-2046-y |
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