Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber

• Main Authors: Annuar, Nurul Zieyana Mohamed, Sabri, Mohd Faizul Mohd, Shuhaimi, Ahmad
• Format: Article
• Language: English
• Published: Springer Verlag (Germany) 2015
• Subjects: T Technology (General); TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/14048/1/Modeling_and_simulation_of_metal_organic_halide_vapor.pdf; http://eprints.um.edu.my/14048/; https://doi.org/10.1007/s00542-013-2046-y

Over the last few decades, there was a substantial appeal on the growth of gallium-nitride (Ga-N) based alloy for high performance optoelectronic devices such as blue/violet laser diode, blue/white light emitting diode etc. In the recent years, there have been revolutionary changes in semiconductor...