ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon

The utilization of a newly developed photosensitive polymeric coating, ProTEK PSB plays a significant role in realizing simple process steps in the fabrication of MEMS devices using bulk micromachining technology. The photosensitive coating which serves as an alternative to the conventional silicon...

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Bibliographic Details
Main Authors: Ab Rahim, Rosminazuin, Bais, Badariah, Yeop Majlis, Burhanuddin, Sugandi, Gandi
Format: Article
Language:English
Published: Springer 2013
Subjects:
Online Access:http://irep.iium.edu.my/30323/1/Microsystem_Technologies_published_version_APRIL_2013.pdf
http://irep.iium.edu.my/30323/
http://link.springer.com/
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