Design, Simulation and Modeling of a Micromachined High Temperature Microhotplate for Application in Trace Gas Detection

A microhotplate (MHP) is a basic Microelectromechanical System (MEMS) structure that is used in many applications such as a platform for metal oxide gas sensors, microfluidics and infrared emission. Semiconductor gas sensors usually require high power because of their elevated operating temperatu...

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Bibliographic Details
Main Author: Ahmed Almahi, Abdelaziz Yousif
Format: Thesis
Language:English
Published: 2009
Online Access:http://utpedia.utp.edu.my/3003/1/thesis_yousif_FINAL_PRINT.pdf
http://utpedia.utp.edu.my/3003/
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