Design, Simulation and Modeling of a Micromachined High Temperature Microhotplate for Application in Trace Gas Detection
A microhotplate (MHP) is a basic Microelectromechanical System (MEMS) structure that is used in many applications such as a platform for metal oxide gas sensors, microfluidics and infrared emission. Semiconductor gas sensors usually require high power because of their elevated operating temperatu...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2009
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| Online Access: | http://utpedia.utp.edu.my/3003/1/thesis_yousif_FINAL_PRINT.pdf http://utpedia.utp.edu.my/3003/ |
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