Design and simulation of a high temperature MEMS microhotplate for application in trace gas detection
In this paper, we present the simulation results of a high temperature MEMS micro-hotplate. The electro-thermomechanical behaviors of micro- hotplates (MHP) have been simulated using CoventorWare. In the simulation, the effects of various thicknesses of the silicon nitride (Si<sub>3</sub>...
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| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://eprints.utp.edu.my/376/1/paper.pdf http://www.scopus.com/inward/record.url?eid=2-s2.0-65949104823&partnerID=40&md5=e412a994b6f74f90ca80c3f7f9aa9dc0 http://eprints.utp.edu.my/376/ |
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