Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor
This paper investigates the electrostatic drive, sense, spring behavior of long beams, resonant frequency, quality factor, resonator noise and damping of resonator parallel to the substrate, using an interdigitated capacitor (electrostatic comb). Resonant frequency of the device is 9.5 kHz with qual...
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my.utp.eprints.69692014-03-29T03:39:08Z Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham TK Electrical engineering. Electronics Nuclear engineering This paper investigates the electrostatic drive, sense, spring behavior of long beams, resonant frequency, quality factor, resonator noise and damping of resonator parallel to the substrate, using an interdigitated capacitor (electrostatic comb). Resonant frequency of the device is 9.5 kHz with quality factor 104. Couette damping is dominant that is equal to 5.34 10-8. The value of Squeeze film damping is small i.e. 2.436 10-13 due to end faces of the fingers of comb resonator. Dominant noise is Brownian and spectral density of this noise force due to Couette and Squeeze film damping are 8.843 10-28 and 4.035 10-33 N2/Hz respectively. At damping ratio 0.0048 electrostatic force of 29.5 nN produces 11.4μm amplitude at resonance in the sensing fingers which shows capacitive sensitivity equals to 0.3684 fF/μm. 2011-10-27 Conference or Workshop Item PeerReviewed http://ieeexplore.ieee.org Ahmad, Farooq and Dennis, John Ojur and Md Khir, Mohd Haris and Hamid, Nor Hisham (2011) Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor. In: NPC2011, 19 - 20 September 2011, UTP, Bandar Sri Iskandar, Perak, Malaysia. http://eprints.utp.edu.my/6969/ |
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TK Electrical engineering. Electronics Nuclear engineering Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor |
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This paper investigates the electrostatic drive, sense, spring behavior of long beams, resonant frequency, quality factor, resonator noise and damping of resonator parallel to the substrate, using an interdigitated capacitor (electrostatic comb). Resonant frequency of the device is 9.5 kHz with quality factor 104. Couette damping is dominant that is equal to 5.34 10-8. The value of Squeeze film damping is small i.e. 2.436 10-13 due to end faces of the fingers of comb resonator. Dominant noise is Brownian and spectral density of this noise force due to Couette and Squeeze film damping are 8.843 10-28 and 4.035 10-33 N2/Hz respectively. At damping ratio 0.0048 electrostatic force of 29.5 nN produces 11.4μm amplitude at resonance in the sensing fingers which shows capacitive sensitivity equals to 0.3684 fF/μm. |
format |
Conference or Workshop Item |
author |
Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham |
author_facet |
Ahmad, Farooq Dennis, John Ojur Md Khir, Mohd Haris Hamid, Nor Hisham |
author_sort |
Ahmad, Farooq |
title |
Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor |
title_short |
Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor |
title_full |
Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor |
title_fullStr |
Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor |
title_full_unstemmed |
Theoretical Analysis of Resonant Lateral Electrostatic Comb drive Actuator and Sensor |
title_sort |
theoretical analysis of resonant lateral electrostatic comb drive actuator and sensor |
publishDate |
2011 |
url |
http://ieeexplore.ieee.org http://eprints.utp.edu.my/6969/ |
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1738655534768193536 |
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13.159267 |