A CMOS-MEMS cantilever sensor for capnometric applications
Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for c...
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2014
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my.utp.eprints.312762022-03-25T09:05:04Z A CMOS-MEMS cantilever sensor for capnometric applications Mirza, A. Hamid, N.H. Khir, M.H.M. Dennis, J.O. Ashraf, K. Shoaib, M. Jan, M.T. Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014. Institute of Electronics Information Communication Engineers 2014 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469 Mirza, A. and Hamid, N.H. and Khir, M.H.M. and Dennis, J.O. and Ashraf, K. and Shoaib, M. and Jan, M.T. (2014) A CMOS-MEMS cantilever sensor for capnometric applications. IEICE Electronics Express, 11 (9). http://eprints.utp.edu.my/31276/ |
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Capnometers monitor the concentration of CO2 in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO2 sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively. © IEICE 2014. |
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Article |
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Mirza, A. Hamid, N.H. Khir, M.H.M. Dennis, J.O. Ashraf, K. Shoaib, M. Jan, M.T. |
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Mirza, A. Hamid, N.H. Khir, M.H.M. Dennis, J.O. Ashraf, K. Shoaib, M. Jan, M.T. A CMOS-MEMS cantilever sensor for capnometric applications |
author_facet |
Mirza, A. Hamid, N.H. Khir, M.H.M. Dennis, J.O. Ashraf, K. Shoaib, M. Jan, M.T. |
author_sort |
Mirza, A. |
title |
A CMOS-MEMS cantilever sensor for capnometric applications |
title_short |
A CMOS-MEMS cantilever sensor for capnometric applications |
title_full |
A CMOS-MEMS cantilever sensor for capnometric applications |
title_fullStr |
A CMOS-MEMS cantilever sensor for capnometric applications |
title_full_unstemmed |
A CMOS-MEMS cantilever sensor for capnometric applications |
title_sort |
cmos-mems cantilever sensor for capnometric applications |
publisher |
Institute of Electronics Information Communication Engineers |
publishDate |
2014 |
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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84900521628&doi=10.1587%2felex.11.20140113&partnerID=40&md5=bf18bd760b5b4d250ad477294ce20469 http://eprints.utp.edu.my/31276/ |
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